Rotatable sputter target
AssigneeApplied Materials, Inc.
InventorsHarald Gartner, Thomas Berger
Life of this patent
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Abstract
A target arrangement for providing material to be deposited on a substrate is provided. The target arrangement includes a target part (210) made of the material to be deposited. The target part may substantially have the shape of a hollow cylinder having an inner (260) and an outer (250) diameter, wherein the hollow cylinder includes a cylindrical surface (211) and two face surfaces (212). The target arrangement may further include a connection arrangement comprising a recess (230) within at least one of the face surfaces of target part. Also, a deposition apparatus including the target arrangement and a method for mounting a target arrangement in a deposition chamber are described.
Claims20
A target arrangement for providing material to be deposited on a substrate, comprising:
- a target part made of the material to be deposited, having substantially the shape of a hollow cylinder having an inner diameter and an outer diameter, wherein the hollow cylinder comprises a cylindrical surface and two face surfaces;
- and
- a connection arrangement comprising a recess within at least one of the face surfaces of the target part, wherein the target arrangement is rotatable.
A sputter deposition apparatus, comprising:
- a target arrangement for providing material to be deposited on a substrate, comprising:
- a target part made of the material to be deposited, having substantially the shape of a hollow cylinder having an inner diameter and an outer diameter, wherein the hollow cylinder comprises a cylindrical surface and two face surfaces;
- and
- a connection arrangement comprising a recess within at least one of the face surfaces of the target part,
- wherein the target arrangement is rotatable.
Method of mounting a target arrangement in a deposition apparatus, comprising:
- inserting a fixation means in a recess, particularly a bore, which is provided in the target material to be deposited.
Dependencies are inferred from the claim text.