Mems
OwnerGuenther Ruhl, Max Christian Lemme +4inventors
InventorsGuenther Ruhl, Max Christian Lemme, Alfons Dehe, Andreas Fischer, Frank Niklaus, Anderson Smith
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Abstract
Embodiments provide a MEMS including a MEMS device and an detector circuit. The MEMS device includes a membrane, wherein a material of the membrane comprises a band gap and a crystal structure with structural elements (unit cells) connected by covalent bonds in two dimensions only. The detector circuit is configured to determine a deformation of the membrane based on a piezoresistive resistance of the material of the membrane.
Claims16
A MEMS, comprising:
- a MEMS device comprising a membrane, wherein a material of the membrane comprises a band gap and a crystal structure with structural elements connected by covalent bonds in two dimensions only;
- and
- a detector circuit configured to determine a deformation of the membrane based on a piezoresistive resistance of the material of the membrane.
A MEMS, comprising:
- a MEMS device comprising a membrane and an inertial mass attached to the membrane, wherein a material of the membrane comprises a crystal structure with structural elements connected by covalent bonds in two dimensions only;
- and
- a detector circuit configured to determine an acceleration or rotation rate of the inertial mass based on a piezoresistive resistance of the material of the membrane.
A Method for manufacturing a MEMS comprising a MEMS device and a detector circuit, the method comprising:
- providing a membrane of the MEMS device, wherein a material of the membrane comprises a band gap and a crystal structure with structural elements connected by covalent bonds in two dimensions only;
- and
- providing a detector circuit configured to determine a deformation of the membrane based on a piezoresistive resistance of the material of the membrane indicative.
Dependencies are inferred from the claim text.