Method of failure analysis
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChin-Cheng Kuo, Kmin Hsu, Wei-Yi Hu, Wei Min Chan, Jui-Feng Kuan
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Abstract
In some methods, a number of input data sets is provided for an integrated circuit (IC) model. A number of scores for the number of input data sets, respectively, are then determined based on probabilities of the respective input data sets resulting in a failure condition, which exists when the IC model fails to meet a predetermined yield criteria. A simulation order for the number of input data sets is then assigned according to the determined number of scores.
Claims20
A simulation method, comprising:
- providing a plurality of input data sets for an integrated circuit (IC) model;
- performing a first simulation by applying a first of the plurality of input data sets to the IC model to generate a first simulation result, wherein the first input data set includes a first input device parameter with a first baseline parametric value and a second input device parameter with a second baseline parametric value;
- performing a second simulation by applying a second of the plurality of input data sets to the IC model to generate a second simulation result, wherein the second input data set includes the first input device parameter but with a first parametric value that differs from the first baseline parametric value and also includes the second input device parameter with the second baseline parametric value;
- determining a sensitivity of the IC model to the first input device parameter by comparing results of the first and second simulations;
- and
- defining a simulation order for remaining input data sets of the plurality of input data sets according to the sensitivity of the IC model to the first input device parameter.
A simulation method, comprising:
- providing a plurality of input data sets for an integrated circuit (IC) model;
- determining a plurality of scores to the plurality of input data sets, respectively, based on probabilities of the respective input data sets resulting in a failure condition where the IC model fails to meet a predetermined yield criteria;
- and
- assigning a simulation order for the plurality of input data sets according to the determined plurality of scores.
A tool arrangement for circuit design, comprising:
- a computing unit to process computer executable instructions;
- and
- a memory operably coupled to the computing unit, the memory configured to store:
- a plurality of input data sets for an integrated circuit (IC) model, simulation ordering instructions to determine a simulation order for the plurality of input data sets based on probabilities of the respective input data sets resulting in a failure condition where the IC model fails to meet a predetermined yield criteria, and simulation instructions to carry out simulations of the input data sets in the simulation order.
A simulation method, comprising:
- providing a plurality of input data sets for an integrated circuit (IC) model;
- performing a first simulation by applying a first of the plurality of input data sets to the IC model to generate a first simulation result, wherein the first input data set includes a first input device parameter with a first baseline parametric value and a second input device parameter with a second baseline parametric value;
- performing a second simulation by applying a second of the plurality of input data sets to the IC model to generate a second simulation result, wherein the second input data set includes the first input device parameter but with a first parametric value that differs from the first baseline parametric value and also includes the second input device parameter with the second baseline parametric value;
- performing a third simulation by applying a third of the plurality of input data sets to the IC model to generate a third simulation result, wherein the third input data set includes the first input device parameter with the first baseline parametric value and also includes the second input device parameter but with a second parametric value that differs from the second baseline parametric value;
- determining first and second sensitivities of the IC model to the first and second input device parameters, respectively, by comparing results of the first simulation to the second and third simulations, respectively;
- calculating first and second weighted sensitivities for the first and second input data parameters, respectively, by dividing the first and second sensitivities by a larger of the first and second sensitivities;
- and
- defining a simulation order for remaining input data sets of the plurality of input data sets according to the weighted sensitivity of the IC model to the first input device parameter.
Dependencies are inferred from the claim text.