Shape measurement method and shape measurement apparatus
AssigneeCanon Kabushiki Kaisha
InventorAkinori Miyata
Life of this patent
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Abstract
A shape measurement method includes acquiring a plurality of partial measurement data sets of a measurement surface and inclination data corresponding to the partial measurement data sets; performing fitting of the partial measurement data sets so that differences between a reference equation and the partial measurement data sets are reduced, while the relative tilt between the partial measurement data sets is maintained less than or equal to a predetermined threshold; and obtaining the shape of the measurement surface by connecting the fitted partial measurement data sets.
Claims10
A shape measurement method for measuring a shape of a measurement surface of a measurement object, the shape measurement method comprising:
- acquiring a plurality of partial measurement data sets of the measurement surface and inclination data corresponding to the partial measurement data sets;
- moving the plurality of partial measurement data sets such that a relative tilt between the partial measurement data sets is reduced;
- performing fitting of the partial measurement data sets so that differences between a reference equation and the partial measurement data sets are reduced, while the relative tilt between the partial measurement data sets is maintained less than or equal to a predetermined threshold;
- and
- obtaining the shape of the measurement surface by connecting the fitted partial measurement data sets.
A shape measurement apparatus for measuring a shape of a measurement surface of a measurement object, the shape measurement apparatus comprising:
- a contact-type or optical shape measurement unit;
- and
- a controller adapted to perform the steps of
- acquiring a plurality of partial measurement data sets of the measurement object and inclination data corresponding to the partial measurement data sets,
- performing fitting of the partial measurement data sets so that differences between a reference equation and the partial measurement data sets are reduced while a relative orientation between the partial measurement data sets is maintained so that a relative tilt between the partial measurement data sets is less than or equal to a threshold determined in advance by using the inclination data corresponding to the partial measurement data sets, and
- obtaining the shape of the measurement surface by connecting the fitted partial measurement data sets.
Dependencies are inferred from the claim text.