Resist underlayer film-forming composition
AssigneeNissan Chemical Industries, Ltd.
InventorsTakafumi Endo, Rikimaru Sakamoto, Noriaki Fujitani
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AssigneeNissan Chemical Industries, Ltd.
InventorsTakafumi Endo, Rikimaru Sakamoto, Noriaki Fujitani
Estimating the term…
A composition forms a resist underlayer film showing improved adhesiveness to a resist pattern. A resist underlayer film-forming composition for lithography, including: a polymer that has a structure of Formula (1a), Formula (1b), or Formula (2) below on an end of the polymer; and an organic solvent: (where R1 is a hydrogen atom or a methyl group; each of R2 and R3 is independently a hydrogen atom or an organic group such as a hydrocarbon group, etc., the hydrocarbon group optionally has at least one of a hydroxy group and a methylthio group as substituent(s); R4 is a hydrogen atom or a hydroxy group; Q1 is an arylene group; v is 0 or 1; y is an integer of 1 to 4; w is an integer of 1 to 4; x1 is 0 or 1; and x2 is an integer of 1 to 5).
A resist underlayer film-forming composition for lithography, comprising:
Dependencies are inferred from the claim text.