Method of manufacturing howllow-structure metal grating
AssigneesHon Hai Precision Industry Co., Ltd., Tsinghua University
InventorsZHEN-DONG ZHU, QUN-QING LI, BEN-FENG BAI, SHOU-SHAN FAN
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Abstract
A method for making a hollow-structure metal grating is provided. The method includes providing a substrate, forming a patterned mask layer on a surface of the substrate, applying a metal layer with a thickness greater than 10 nanometers on the patterned mask layer, and removing the patterned mask layer by a washing method using organic solvent. The patterned mask layer includes a plurality of first protruding structures and a plurality of first cavities arranged in intervals.
Claims20
A method of manufacturing a hollow-structure metal grating, the method comprising:
- S10, providing a substrate;
- S20, applying a protecting layer on a surface of the substrate;
- S30, forming a patterned mask layer on a surface of the protecting layer, wherein a part of the protecting layer is exposed out of the patterned mask layer;
- S40, applying a metal layer with a thickness greater than 10 nanometers on the patterned mask layer, wherein the patterned mask layer and the part of the protecting layer exposed out of the patterned mask layer is covered by the metal layer;
- and
- S50, removing the patterned mask layer to obtain the hollow-structure metal grating.
A method of manufacturing a hollow-structure metal grating, the method comprising:
- S10, providing a substrate;
- S20, forming a patterned mask layer on a surface of the substrate, wherein the patterned mask layer comprises a plurality of first protruding structures and a plurality of first cavities arranged in intervals, each of the plurality of first protruding structures comprises two first sides opposite to each other, and two opposite second sides are opposite to each other;
- S30, applying a metal layer with a thickness greater than 10 nanometers on the patterned mask layer, wherein the patterned mask layer and a part of the protecting layer exposed out of the patterned mask layer are covered by the metal layer, the two first sides are coated by the metal layer, and the two second sides are exposed;
- and
- S40, removing the patterned mask layer by a washing method using organic solvent to obtain the hollow-structure metal grating.
Dependencies are inferred from the claim text.