Method of manufacturing howllow-structure metal grating
AssigneesHon Hai Precision Industry Co., Ltd., Tsinghua University
InventorsZHEN-DONG ZHU, QUN-QING LI, BEN-FENG BAI, SHOU-SHAN FAN
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Abstract
A method for making a hollow-structure metal grating is provided. The method includes the following steps. First, a substrate is provided. Second, a metal layer is located on a surface of the substrate. Third, a patterned mask layer is formed on a surface of the metal layer. The patterned mask layer is made of a chemical amplified photoresist. Fourth, the surface of the metal layer exposed out of the patterned mask layer is plasma etched. Lastly, the patterned mask layer on the surface of the metal layer is dissolved.
Claims20
A method of manufacturing a hollow-structure metal grating, the method comprising:
- S10, providing a substrate;
- S20, applying a metal layer on a surface of the substrate;
- S30, forming a patterned mask layer on a surface of the metal layer, wherein the patterned mask layer is made of a chemical amplified photoresist;
- S40, plasma etching part of the surface of the metal layer exposed out of the patterned mask layer;
- and
- S50, dissolving the patterned mask layer on the surface of the metal layer.
A method of manufacturing a hollow-structure metal grating, the method comprising:
- S10, providing a substrate;
- S20, applying a metal layer on a surface of the substrate;
- S30, forming a patterned mask layer on a surface of the metal layer, wherein the patterned mask layer is made of a chemical amplified photoresist, and parts of the metal layer is exposed out of the patterned mask layer;
- S40, plasma etching part of the surface of the metal layer exposed out of the patterned mask layer to form a plurality of sub-metal layers dispersed in the patterned mask layer, the plurality of sub-metal layers are substantially perpendicular to the substrate, and the parts of the substrate between the adjacent sub-metal layers is exposed;
- and
- S50, dissolving the patterned mask layer on the surface of the metal layer to expand and push the sub-metal layers tipping upwards, and to connect adjacent sub-metal layers.
Dependencies are inferred from the claim text.