Manufacturing method of semiconductor device

A manufacturing method of a semiconductor device, comprising:

• forming, in a semiconductor layer of a first conductive type in which a transistor region and a diode region are respectively defined, a body region of a second conductive type in said transistor region, and leaving said diode region as a first conductive type region for a diode;
• forming a source region and a drain region of the first conductive type in the semiconductor layer so as to be separated from each other across the body region;
• forming both a source trench in the semiconductor layer and a diode trench in the diode region at the same time, the source trench reaching the body region through the source region;
• injecting an impurity ion into the semiconductor layer near a bottom of the source trench and near a bottom of the diode trench to form, at the same time, a body contact region near the bottom of the source trench and in the semiconductor layer that includes the body region, and a second conductive type region for a diode in the semiconductor layer near the bottom of the diode trench, the body contact region being the second conductive type and having a higher impurity concentration than that of the body region, the second conductive type region for a diode having the second conductive type and forming a pn junction with the first conductive type region for a diode;
• forming a gate electrode facing through a gate insulating layer the body region that lies between the source region and the drain region;
• and
• embedding a source electrode in the source trench at the same time as forming a schottky electrode that forms a schottky junction with the first conductive type region for a diode at side walls of the diode trench.