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AssigneesNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO, Imec Vzw
InventorsErwin Rinaldo Meinders, Henri Fledderus, An Maria Prenen
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A light induced forward transfer manufacturing method provides for transfer of material from a donor sheet. A donor sheet is used that comprises a trench in a surface of the donor sheet, with transfer material in the trench. The material is transferred by scanning a light spot along the bottom of the trench. A donor sheet is used in which the average depth of the trench varies in the scanning direction. This supports optical reading of position information from the trench through the donor sheet and/or transfer of structures with predetermined height profiles from the trench. In combination with the average depth, or by themselves, a trench width, deviation of a trench from an average track or variation of a thickness or composition of material at a bottom of the trench may vary as a function of position along the trench to support optical reading of position information and/or transfer of predetermined structures.
A method of manufacturing a structure by means of light induced forward transfer of material from a donor sheet onto the structure, wherein the donor sheet comprises a trench in a surface of the donor sheet, the trench comprising donor material, wherein at least one of an average trench depth, an average trench width, a deviation of a trench from an average track or a thickness or composition of material at a bottom of the trench varies as a function of position along the trench.
A donor sheet for use in a light induced forward transfer of donor material, the donor sheet comprising a transparent substrate and a trench comprising donor material, the trench extending into the substrate from a surface of the donor sheet, wherein a property of the trench varies as a function of position on the donor sheet, the property being at least one of an average trench depth, an average trench width, a deviation of a trench from an average trench track or a thickness or composition of material at a bottom of the trench.
A method of manufacturing a donor sheet, the method comprising molding a transparent substrate from a master that defines a trench in the substrate, the trench having a property that varies as a function of position on the donor sheet, the property being at least one of an average trench depth, an average trench width, a deviation of a trench from an average trench track or a thickness or composition of material at a bottom of the trench and at least partially filling the trench with donor material.
A manufacturing system for manufacturing a structure by means of light induced forward transfer, the manufacturing system comprising
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