Back to results
US 2015/0086402 A1Published application
Pump device
AssigneeUlvac Kiko, Inc.
InventorsTaisuke Osaka, Yusaku Tanabe, Motoyasu Chouno, Ryuji Itoyama
Life of this patent
Estimating the term…
Abstract
A pump device (1) according to an embodiment of the present invention includes a drive motor (M), a first pump unit for evacuation (11) including a first pump chamber and a first piston (21v), and a second pump unit for pressurization (12) including a second pump chamber and a second piston (21c). The second piston (21c) has a phase advanced with a rotational phase difference (φ) of more than 0° and less than 80° with respect to the first piston (21v).
Claims3
A pump device, comprising:
- a drive motor including a first drive shaft and a second drive shaft and being capable of rotating the first drive shaft and the second drive shaft in synchronization about a first axis;
- a first pump unit for evacuation, including a first piston that reciprocates in a direction of a second axis orthogonal to the first axis by a rotation of the first drive shaft, and a first pump chamber that has an internal pressure changing in accordance with a reciprocating movement of the first piston;
- and
- a second pump unit for pressurization, including a second piston that reciprocates in the direction of the second axis by a rotation of the second drive shaft, and a second pump chamber that has an internal pressure changing in accordance with a reciprocating movement of the second piston, the second piston having a phase advanced with a rotational phase difference of more than 0° and less than 80° with respect to the first piston.
1 more element
Dependencies are inferred from the claim text.