US 2015/0086328 A1 · TURBO-MOLECULAR PUMP

Abstract

A turbo-molecular pump comprises: a rotor having a plurality of stages of rotor blades and a cylindrical section; a plurality of stages of stationary blades alternately arranged with respect to the rotor blades; a stator arranged with a gap from the cylindrical section, the stator together with the cylindrical section constituting a screw groove pump section; a plurality of spacers stacked on a base, the spacers including at least one cooling spacer having a cooling section; a heater heating the stator; a temperature regulation section controlling the heater to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature; and an auxiliary ring for reaction product accumulation prevention at least a part of which is located in a space between the spacer facing a bottom step rotor blade, and the bottom step rotor blade.

Claims10

Dependent claims

A turbo-molecular pump comprising:

a rotor having a plurality of stages of rotor blades and a cylindrical section;
a plurality of stages of stationary blades alternately arranged with respect to the rotor blades;
a stator arranged with a gap from the cylindrical section, the stator together with the cylindrical section constituting a screw groove pump section;
a plurality of spacers stacked on a base, the spacers including at least one cooling spacer having a cooling section;
a heater heating the stator;
a temperature regulation section controlling the heater to regulate the temperature of the stator so as to be a reaction product accumulation prevention temperature;
and
an auxiliary ring for reaction product accumulation prevention at least apart of which is located in a space between the spacer facing a bottom step rotor blade, and the bottom step rotor blade.

5 more elements

A turbo-molecular pump comprising:

a rotor having a plurality of stages of rotor blades and a cylindrical section;
a plurality of stages of stationary blades alternately arranged with respect to the rotor blades;
a stator arranged with a gap from the cylindrical section, the stator together with the cylindrical section constituting a screw groove pump section;
and
a plurality of spacers stacked on a base, the spacers including a bottom step cooling spacer having a cooling section;
wherein
on at least one of a contact surface of the bottom step stationary blade supported by the cooling spacer, the contact surface making contact with the cooling spacer, and a contact surface of the cooling spacer, the contact surface making contact with the bottom step stationary blade, a heat resistant section suppressing heat transfer from the bottom step stationary blade to the cooling spacer is provided.

4 more elements

Dependencies are inferred from the claim text.

Turbo-molecular pump

Life of this patent

Turbo-molecular pump

Life of this patent

Abstract

Claims10