Processing object transport system, and substrate inspection system

A substrate inspection system, wherein

• a processing object in a processing object transport system is a substrate, and the process is inspection of the substrate
• said processing object transport system including a plurality of processing units, each processing unit comprising:
• a first transport mechanism configured to transport the processing object along a transport passage which extends substantially horizontally;
• a transfer mechanism configured to transfer the processing object transported by the first transport mechanism, to a retracted position retracted from the transport passage, at a set position set in advance on the transport passage;
• and
• a processor configured to perform the predetermined process on the processing object positioned at the retracted position, wherein
• the plurality of processing units are arranged such that a plurality of transport passages of the respective processing units are aligned and such that the transport directions of the respective processing units are the same direction,
• between two adjacent transport passages out of the plurality of transport passages, two first transport mechanisms corresponding to the two transport passages deliver the processing object from the transport passage on an upstream side in the transport direction to the transport passage on a downstream side, and
• each first transport mechanism is configured to transport another processing object which is different from the processing object without interfering with the processing object while the processing object is positioned at the retracted position, when the processing object is transferred to the retracted position by the transfer mechanism in the corresponding processing unit.