Method and apparatus for locally deforming an optical element for photolithography
AssigneeCarl Zeiss SMS GmbH
InventorsVladimir Dmitriev, Uri Stern
Life of this patent
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Abstract
The invention relates to a method for locally deforming an optical element for photolithography in accordance with a predefined deformation form comprising: (a) generating at least one laser pulse having at least one laser beam parameter; and (b) directing the at least one laser pulse onto the optical element, wherein the at least one laser beam parameter of the laser pulse is selected to yield the predefined deformation form.
Claims33
A method for locally deforming an optical element for photolithography in accordance with a predefined deformation form, the method comprising:
- a. generating at least one laser pulse having at least one laser beam parameter;
- and
- b. directing the at least one laser pulse onto the optical element, wherein the at least one laser beam parameter of the laser pulse is selected to yield the predefined deformation form.
A method for locally deforming an optical element for photolithography in accordance with a predefined deformation form, the method comprising:
- directing at least one first and at least one second laser pulse onto the optical element creating a first and a second local deformation, wherein the combination of the first and the second local deformation essentially yields the predefined deformation form.
An apparatus for locally deforming an optical element for photolithography in accordance with a predefined deformation form, comprising:
- a. a light source for generating at least one laser pulse;
- b. an optical component for selecting at least one laser beam parameter of the at least one laser pulse;
- and
- c. an objective for directing the at least one laser pulse onto the optical element, wherein the laser beam parameter is selected to yield the predefined deformation form.
An apparatus for locally deforming an optical element for photolithography in accordance with a predefined deformation form, the apparatus comprising:
- a. a light source for generating at least one first and at least one second laser pulse;
- and
- b. an objective for directing the at least one first and the at least one second laser pulse onto the optical element creating a first and a second local deformation, wherein the combination of the first and the second local deformation essentially yields the predefined deformation form.
Dependencies are inferred from the claim text.