US 2015/0085264 A1 · ROTARY EUV COLLECTOR

Abstract

An EUV collector is rotated between or during operations of an EUV photolithography system. Rotating the EUV collector causes contamination to distribute more evenly over the collector's surface. This reduces the rate at which the EUV photolithography system loses image fidelity with increasing contamination and thereby increases the collector lifetime. Rotating the collector during operation of the EUV photolithography system can induce convection and reduce the contamination rate. By rotating the collector at sufficient speed, some contaminating debris can be removed through the action of centrifugal force.

Claims20

Dependent claims

A method of operating an extreme ultraviolet (EUV) lithography system, comprising:

generating EUV light;
using a collector to gather and focus the light onto an optical system that illuminates a reticle and projects an image from the reticle onto a target;
rotating the collector to a new position;
and
again using the collector to gather and focus the light onto the optical system that illuminates a reticle and projects an image from the reticle onto a target.

2 more elements

Dependencies are inferred from the claim text.

Rotary euv collector

Life of this patent

Rotary euv collector

Life of this patent

Abstract

Claims20