Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same

An inspection apparatus for detecting a defect of a substrate, the inspection apparatus comprising:

• a liquid crystal modulator;
• a light emitting unit configured to emit light;
• a beam splitter configured to divide the light emitted from the light emitting unit into a plurality of beams and to provide the plurality of beams to the liquid crystal modulator;
• and
• a measurement unit configured to sense a plurality of beams output from the liquid crystal modulator,
• wherein the liquid crystal modulator comprises:
• a reflection layer configured to reflect the plurality of beams provided from the beam splitter;
• a liquid crystal layer provided on the reflection layer and including a hybrid aligned nematic liquid crystal;
• an electrode provided on the liquid crystal layer;
• and
• a polarizer provided on the electrode.