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AssigneeFreescale Semiconductor, Inc.
InventorsMaxime Clairet, Carlos Pereira
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A heating system is described for generating heat and bringing heat to a semiconductor device under test. The heating system comprises a conduction heating unit comprising a heating resistor, a thermal contact area for thermally contacting the semiconductor device under test, and a thermally conductive and electrically insulating connection between the heating resistor and the thermal contact area. The heating resistor is operable to generate a user-defined amount of heat and arranged to provide a part of the heat generated by the heating resistor to the thermal contact area via the thermally conductive and electrically insulating connection. It is also described that the heating system may further comprise a convection heating chamber operable to provide a user-defined heat-controlled convection to the semiconductor device under test. A method of testing a semiconductor device using a heating system is also described.
A heating system for generating heat and bringing heat to a semiconductor device under test, the heating system comprising:
A method of testing a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.