Inspection apparatus and inspection system
AssigneeKabushiki Kaisha Toshiba
InventorsHiroyuki KAYANO, Toshiro HIRAOKA
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Abstract
An inspection apparatus of an embodiment includes a transmitting antenna device connected to a transmitting unit including a transmitting device configured to transmit a microwave, and a receiving antenna device connected to a receiving unit including a receiving device. Each of the transmitting antenna device and the receiving antenna device faces a subject to be inspected. The receiving antenna device receives at least one of a microwave transmitted from the transmitting antenna device and penetrating the subject to be inspected, a microwave of which phase has been delayed, and a microwave diffracted in the subject to be inspected. The receiving unit is a directional antenna.
Claims12
An inspection apparatus comprising:
- a transmitting antenna device connected to a transmitting unit including a transmitting device configured to transmit a microwave;
- and
- a receiving antenna device connected to a receiving unit including a receiving device,
- wherein each of the transmitting antenna device and the receiving antenna device faces a subject to be inspected,
- the receiving antenna device receives at least one of a microwave transmitted from the transmitting antenna device and penetrating the subject to be inspected, a microwave of which phase has been delayed, and a microwave diffracted in the subject to be inspected, and
- the receiving unit is a directional antenna.
An inspection system comprising:
- a transmitting unit transmitting a microwave to a subject to be inspected;
- a receiving unit receiving at least one of a microwave penetrating the subject to be inspected, a microwave of which phase has been delayed, and a microwave diffracted in the subject to be inspected;
- and
- a detecting unit detecting a foreign material in the subject to be inspected by analyzing a received signal,
- wherein the receiving unit has a directional antenna.
Dependencies are inferred from the claim text.