Back to results
US 2015/0084261 A1Published application
Flow path member, heat exchanger including the flow path member, and semiconductor manufacturing apparatus including the flow path member
AssigneeKYOCERA Corporation
InventorsKeiichi Sekiguchi, Kazuhiko Fujio, Yuusaku Ishimine
Life of this patent
Estimating the term…
Abstract
A flow path member includes a flow path which has an inlet and an outlet in a base made of ceramics, and a low resistance portion whose surface resistance is less than 1×107 Ω/sq in at least a part of the flow path.
Claims10
A flow path member comprising:
- a flow path which includes an inlet and an outlet in a base made of ceramics;
- and
- a low resistance portion whose surface resistance is less than 1×107 Ω/sq in at least a part of the flow path.
Dependencies are inferred from the claim text.