Active vibration isolation system
AssigneeTechnical Manufacturing Corporation
InventorsEmil Kraner, Antonio Lopes
Life of this patent
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Abstract
An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.
Claims1
An active damping system configured to be positioned between a base and an isolated payload, the active damping system comprising:
- an intermediate mass;
- plural payload support elements configured to be coupled between the isolated payload and the intermediate mass;
- plural intermediate mass support elements configured to be coupled between the intermediate mass and the base, wherein the intermediate mass support elements are configured to support at least 70% of a static force of the isolated payload;
- an active damping actuator having one end coupled to the intermediate mass and an opposite end configured to be coupled to the base, wherein the active damping actuator exhibits a stiffness at least two orders of magnitude less than a stiffness exhibited by the intermediate mass support element;
- a first sensor configured to generate a first signal responsive to movement of the intermediate mass caused by dynamic forces;
- and
- a compensation module configured to be coupled to the first sensor and the active damping actuator, the compensation module configured to respond to the first sensor signal by actuating the active damping actuator to dampen the dynamic forces acting on the intermediate mass.
Dependencies are inferred from the claim text.