Radiation detector and radiation detection apparatus
AssigneeKabushiki Kaisha Toshiba
InventorsHitoshi YAGI, Rei HASEGAWA, Masaki ATSUTA, Yasuharu HOSONO, Keita SASAKI, Go KAWATA
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AssigneeKabushiki Kaisha Toshiba
InventorsHitoshi YAGI, Rei HASEGAWA, Masaki ATSUTA, Yasuharu HOSONO, Keita SASAKI, Go KAWATA
Estimating the term…
A radiation detector according to an embodiment includes: a semiconductor substrate; a light detecting unit provided on a side of a first surface of the semiconductor substrate; a first insulating film provided covering the light detecting unit; a second insulating film covering the first insulating film; a scintillator provided on the second insulating film; an interconnection provided between the first and second insulating films, and connected to the light detecting unit; a first electrode connected to the interconnection through a bottom portion of the first opening; a second electrode provided on a region in the second surface of the semiconductor substrate, the region opposing at least a part of the light detecting unit; a second opening provided in a region surrounding the first electrode and not surrounding the second electrode; and an insulating resin layer covering the first and second electrodes and the first and second openings.
A radiation detector comprising:
Dependencies are inferred from the claim text.