Optical semiconductor element and method of manufacturing the same
AssigneeFujitsu Limited
InventorMasahiro Iwama
Life of this patent
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Abstract
A disclosed optical semiconductor element includes: a semiconductor substrate having a first main surface and a second main surface in which a plurality of first grooves are formed; a first optical waveguide defined by portions of the semiconductor substrate between the first grooves and having side faces defined by the first grooves; and a photoelectric converter configured to transmit or receive an optical signal propagating through the first optical waveguide. Moreover, the first grooves define part of a guide hole.
Claims15
An optical semiconductor element, comprising:
- a semiconductor substrate having a first main surface and a second main surface in which a plurality of first grooves are formed;
- a first optical waveguide defined by portions of the semiconductor substrate between the first grooves and having side faces defined by the first grooves;
- and
- a photoelectric converter configured to transmit or receive an optical signal propagating through the first optical waveguide, wherein
- the first grooves define part of a guide hole.
A method of manufacturing an optical semiconductor element, the method comprising:
- forming a photoelectric converter on a semiconductor layer, the photoelectric converter being configured to transmit or receive an optical signal;
- fixing a semiconductor substrate having a first main surface and a second main surface onto the photoelectric converter at the first main surface;
- and
- after the fixing the semiconductor substrate, forming a plurality of first grooves in the second main surface of the semiconductor substrate to thereby make portions of the semiconductor substrate between the first grooves into a first optical waveguide through which the optical signal propagates, the plurality of first grooves defining part of a plurality of guide holes.
Dependencies are inferred from the claim text.