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US 2015/0083601 A1Published application
Near field transducers including electrodeposited plasmonic materials and methods of forming
AssigneeSeagate Technology LLC
InventorsLien Lee, Jie Gong, Venkatram Venkatasamy, Yongjun Zhao, Lijuan Zou, Dongsung Hong, Ibro Tabakovic, Mark Ostrowski
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Abstract
Methods of forming near field transducers (NFTs) including electrodepositing a plasmonic material.
Claims20
A method of forming a lollipop type near field transducer (NTL), the method comprising the steps:
- forming a rod, wherein the rod is electrically grounded;
- forming a photoresist mask, the photoresist mask forming at least one opening, wherein the rod is situated at least partially within the at least one opening;
- electrodepositing material within the at least one opening;
- and
- removing the photoresist mask.
2 more elements
A method of forming a lollipop type near field transducer (NTL), the method comprising the steps:
- electrodepositing a sheet of a first plasmonic material;
- forming a photoresist mask, the photoresist mask forming at least one opening;
- electrodepositing a second plasmonic material at least in the at least one opening of the photoresist mask;
- removing the photoresist mask;
- and
- forming a rod, wherein the rod is formed from at least a portion of the first plasmonic material.
3 more elements
A method of forming a lollipop type near field transducer (NTL), the method comprising the steps:
- electrodepositing a sheet of a first plasmonic material;
- forming a photoresist mask, the photoresist mask forming at least one opening;
- electrodepositing a second plasmonic material at least in the at least one opening of the photoresist mask, wherein the second plasmonic material does not entirely fill the at least one opening;
- depositing a diffusion barrier material on the second plasmonic material in at least the at least one opening;
- removing the photoresist mask;
- and
- forming a rod, wherein the rod is formed from at least a portion of the first plasmonic material.
4 more elements
Dependencies are inferred from the claim text.