Perforated MOS Structure for Single Biomolecule Detection
AssigneePurdue Research Foundation
InventorsSaeed Mohammadi, Mojgan Sarmadi, Hossein Pajouhi
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Abstract
A perforated metal oxide semiconductor (MOS) structure for single biomolecule, virus, or single cell detection is disclosed. The structure includes a nanochannel formed through a sensing region configured to allow a solution containing particles to pass through the perforated MOS sensor. First and second terminals are configured to measure electrical parameters representative of change of electrical characteristics of the solution as the particle passes through the perforated MOS structure.
Claims20
A perforated metal oxide semiconductor (MOS) sensor, comprising:
- a sensing portion including
- a doped substrate;
- a highly doped region disposed within the substrate;
- an oxide layer disposed on the substrate;
- a first metal portion coupled to the highly doped region;
- a first terminal coupled to the first metal portion;
- a poly-silicon layer disposed within the oxide layer;
- a second metal portion coupled to the poly-silicon layer;
- a second terminal coupled to the second metal layer;
- a nanochannel formed through the sensing portion configured to allow a solution containing particles to pass through the perforated MOS sensor, the first terminal and the second terminal configured to measure electrical parameters representative of change of electrical characteristics of the solution as a particle passes through the perforated MOS sensor.
A system, comprising:
- a perforated MOS sensor, the MOS sensor having a nanochannel formed through the sensing portion and configured to allow a solution containing particles to pass through the perforated MOS sensor, the MOS sensor having a first terminal and a second terminal configured to measure electrical parameters representative of change of electrical characteristics of the solution as a particle passes through the perforated MOS sensor a doped substrate;
- and
- an amplifier operatively connected to the first and second terminals, the amplifier located on the same device with the perforated MOS sensor.
A system, comprising,
- a perforated MOS sensor having a nanochannel configured to receive a biomolecule, a virus or a single cell, the sensor having first and second terminals;
- an energization interrogation circuit operatively connected to the first and second terminals, the energization interrogation circuit configured to apply voltage to the sensor.
Dependencies are inferred from the claim text.