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US 2015/0083586 A1Published application
Deposition apparatus
AssigneeCanon Anelva Corporation
InventorsTeruaki ONO, Masahiro SHIBAMOTO
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Abstract
A deposition apparatus comprises a source unit having a function of generating a plasma by an arc discharge; and a filter unit configured to transport the plasma generated by the source unit toward a material to be deposited, wherein the filter unit includes a duct configured to transport the plasma, a magnetic field formation unit configured to form, in the duct, a magnetic field for transporting the plasma, and a magnetic field bending unit configured to generate a magnetic force for bending the magnetic field formed by the magnetic field formation unit.
Claims7
A deposition apparatus comprising:
- a source unit having a function of generating a plasma by an arc discharge;
- and
- a filter unit configured to transport the plasma generated by the source unit toward a material to be deposited,
- wherein the filter unit includes a duct configured to transport the plasma, a magnetic field formation unit configured to form, in the duct, a magnetic field for transporting the plasma, and a magnetic field bending unit configured to generate a magnetic force for bending the magnetic field formed by the magnetic field formation unit.
1 more element
Dependencies are inferred from the claim text.