Manufacture of multijunction solar cell devices
OwnerBruno Ghyselen, Chantal Arena +2inventors
InventorsBruno Ghyselen, Chantal Arena, Frank Dimroth, Andreas W. Bett
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Abstract
The present disclosure relates to a method for manufacturing a multi-junction solar cell device comprising the steps of: providing a first engineered substrate; providing a second substrate; forming at least one first solar cell layer on the first engineered substrate to obtain a first wafer structure; forming at least one second solar cell layer on the second substrate to obtain a second wafer structure; bonding the first wafer structure to the second wafer structure; detaching the first engineered substrate; removing the second substrate; and bonding a third substrate to the at least one first solar cell layer.
Claims20
A method for manufacturing a multi-junction solar cell device comprising the steps of:
- providing a first engineered substrate;
- providing a second substrate;
- forming at least one first solar cell layer on the first engineered substrate to obtain a first wafer structure;
- forming at least one second solar cell layer on the second substrate to obtain a second wafer structure;
- bonding the first wafer structure to the second wafer structure;
- detaching the first engineered substrate;
- removing the second substrate;
- and
- bonding a third substrate to the at least one first solar cell layer.
A multi-junction solar cell device obtainable by the method comprising the following steps:
- providing a first engineered substrate;
- providing a second substrate;
- forming at least one first solar cell layer on the first engineered substrate to obtain a first wafer structure;
- forming at least one second solar cell layer on the second substrate to obtain a second wafer structure;
- bonding the first wafer structure to the second wafer structure;
- detaching the first engineered substrate;
- removing the second substrate;
- and
- bonding a third substrate to the at least one first solar cell layer.
An intermediate semiconductor substrate for a multi-junction solar cell comprising:
- a first substrate comprising GaAs or Ge;
- a fourth solar cell layer, a third solar cell layer, a second solar cell layer, and a first solar cell layer disposed in this sequence on the first substrate, wherein the first solar cell layer comprises GaInAs, and/or the second solar cell layer comprises GaInAsP, and/or the third solar cell layer comprises GaAs, and/or the fourth solar cell layer comprises GaInP.
An intermediate semiconductor substrate, comprising:
- a first substrate comprising InP;
- a first solar cell layer, a second solar cell layer, a third solar cell layer, and a fourth solar cell layer disposed in this sequence on the first substrate, wherein the first solar cell layer comprises GaInAs, and/or the second solar cell layer comprises GaInAsP, and/or the third solar cell layer comprises GaAs, and/or the fourth solar cell layer comprises GaInP.
An intermediate semiconductor substrate, comprising:
- a first substrate comprising InP;
- a first solar cell layer, a second solar cell layer, a third solar cell layer, and a fourth solar cell layer disposed in this sequence on the first substrate, wherein the first solar cell layer comprises GaInAs, and/or the second solar cell layer comprises GaInAsP, and/or the third solar cell layer comprises GaAs, and/or the fourth solar cell layer comprises GaInP;
- and
- a handling substrate comprising a glass material disposed on the fourth solar cell layer.
A method for manufacturing a multi-junction solar cell device comprising the steps of:
- providing a first engineered substrate;
- providing a second substrate;
- forming at least one first solar cell layer on the first engineered substrate to obtain a first wafer structure;
- forming at least one second solar cell layer on the second substrate to obtain a second wafer structure;
- bonding a handling substrate to the second wafer structure at the at least one second solar cell layer;
- detaching the second substrate to obtain a third wafer structure, wherein the detachment is performed by etching and/or grinding and followed by thinning by polishing;
- bonding the third wafer structure to the first wafer structure at the at least one first solar cell layer and the at least one second solar cell layer;
- detaching the first engineered substrate to obtain a fourth wafer structure;
- bonding the fourth wafer structure at the at least one first solar cell layer to a final substrate;
- and
- detaching the handling substrate.
A method for manufacturing a multi-junction solar cell device comprising the steps of:
- providing a first substrate comprising a bulk InP substrate;
- providing a second engineered substrate comprising a sapphire substrate including a zipper layer, wherein the second engineered substrate comprises a GaAs seed layer;
- forming at least a first solar cell layer on the first substrate to obtain a first wafer structure;
- forming at least a second solar cell layer on the seed layer to obtain a second wafer structure;
- bonding the first wafer structure and the second wafer structure at the at least one first solar cell layer and the at least one second solar cell layer to obtain a bonded structure;
- detaching the first substrate from the bonded structure;
- detaching the second engineered substrate;
- and
- bonding a third substrate to the at least one first solar cell layer.
Dependencies are inferred from the claim text.