Solar cell, manufacturing method for solar cell, and solar cell module

A manufacturing method for a solar cell comprising:

• a first step of forming, with a thermal diffusion method, on one surface side of a semiconductor substrate of a first conductivity type, a first impurity diffusion layer, in which an impurity element of a second conductivity type is diffused at a first concentration, and an impurity element oxide film that contains an oxide of the impurity element of the second conductivity type as a main component and covers the first impurity diffusion layer;
• a second step of selectively forming a second impurity diffusion layer, containing the impurity element at a second concentration higher than the first concentration, by performing laser irradiation in a forming region of a light-receiving-surface-side electrode in the first impurity diffusion layer and locally heating the forming region;
• a third step of forming a passivation film, which is made of an oxide film of a material of the semiconductor substrate, with different thicknesses on the first impurity diffusion layer and the second impurity diffusion layer by oxidizing one surface side of the semiconductor substrate with steam oxidation or pyrogenic oxidation;
• a fourth step of forming the light-receiving-surface-side electrode in a region on the second impurity diffusion layer on the passivation film;
• and
• a fifth step of forming a rear-surface-side electrode on another surface side of the semiconductor substrate.