Carbon fiber ring susceptor
AssigneeApplied Materials, Inc.
InventorsJoseph M. RANISH, Paul BRILLHART, Mehmet Tugrul SAMIR, Shu-Kwan LAU, Surajit KUMAR
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Abstract
Embodiments described herein generally relate to an apparatus for heating substrates. In one embodiment, a susceptor comprises a ring shaped body having a central opening and a lip extending from an edge of the body that circumscribes the central opening. The susceptor comprises carbon fiber or graphene. In another embodiment, a method for forming a susceptor comprises molding carbon fiber with an organic binder into a shape of a ring susceptor and firing the organic binder. In yet another embodiment, a method for forming a susceptor comprises layering graphene sheets into a shape of a ring susceptor.
Claims20
A susceptor, comprising:
- a ring shaped body having a front side and a central opening;
- a lip extending from an edge of the body and circumscribing the central opening, wherein the susceptor comprises carbon fiber or graphene.
A susceptor, comprising:
- a body having a top surface and a bottom surface and an outer perimeter;
- a lip extending from the bottom side above the top side and proximate the outer perimeter, wherein the susceptor comprises carbon fiber or graphene.
A deposition chamber comprising:
- an upper quartz dome and a quartz lower dome;
- a base ring separating the upper quartz dome and lower quartz dome;
- and
- a susceptor having a ring shaped body with a central opening, wherein the susceptor is circumscribed within the base ring and comprises carbon fiber or graphene.
Dependencies are inferred from the claim text.