Mask fixing device and deposition apparatus having the same
AssigneeSamsung Display Co., Ltd.
InventorsSukbeom YOU, Hyungmin Kim
Life of this patent
Estimating the term…
Abstract
A mask fixing device is disclosed. In one aspect, the mask fixing device includes a plate and a magnetic assembly. The magnetic assembly faces a mask such that a substrate is interposed therebetween and generates a magnetic force to fix the mask to the substrate. The plate holds the magnetic assembly and faces the substrate. The magnetic assembly includes a plurality of first and second magnetic members respectively having first and second magnetic poles. The first magnetic members and the second magnetic members are alternately arranged.
Claims20
A mask fixing device that fixes a mask to a substrate for a flat panel display, comprising:
- a magnetic assembly configured to apply a magnetic force to the mask so as to fix the mask to the substrate, wherein the substrate is configured to be interposed between and contact one end of the magnetic assembly and the mask;
- and
- a plate holding at least another opposing end of the magnetic assembly and configured to face the substrate,
- wherein the magnetic assembly comprises:
- a plurality of first magnetic members each having a first magnetic pole facing the plate;
- and
- a plurality of second magnetic members each having a second magnetic pole facing the plate, wherein the second magnetic pole is different from the first magnetic pole,
- wherein at least two neighboring first magnetic members are alternately and repeatedly arranged with at least two neighboring second magnetic members.
A deposition apparatus for a display device, comprising:
- a chamber;
- a deposition source disposed in the chamber and configured to provide a deposition material to the substrate;
- a mask fixing device disposed in the chamber to fix a mask to the substrate, the mask fixing device comprising:
- a magnetic assembly configured to apply a magnetic force to the mask so as to fix the mask to the substrate, wherein the substrate is configured to be interposed between and contact one end of the magnetic assembly and the mask;
- and
- a plate holding at least another opposing end of the magnetic assembly,
- wherein the magnetic assembly comprises:
- a plurality of first magnetic members each having a first magnetic pole facing the plate;
- and
- a plurality of second magnetic members each having a second magnetic pole facing the plate, wherein the second magnetic pole is different from the first magnetic pole,
- wherein at least two neighboring first magnetic members are alternately and repeatedly arranged with at least two neighboring second magnetic members.
A mask fixing device that fixes a mask to a substrate for a display device, comprising:
- a magnetic assembly comprising first magnetic members and second magnetic members;
- wherein the first and second magnetic members each respectively having first and second magnetic poles configured to face and contact the substrate,
- wherein the first magnetic members comprise a plurality of first groups of magnetic members spaced apart from each other, wherein each first group comprises at least two first magnetic members neighboring each other,
- wherein the second magnetic members comprise a plurality of second groups of magnetic members spaced apart from each other, wherein each second group comprises at least two second magnetic members neighboring each other,
- wherein the first and second magnetic members are configured to apply a magnetic force to the mask to fix the mask to the substrate,
- wherein the substrate is interposed between and contacts the magnetic assembly and the mask,
- wherein the first and second magnetic poles have different polarities, and
- wherein the first groups of magnetic members and the second groups of magnetic members are alternately arranged.
Dependencies are inferred from the claim text.