Rotatable substrate support having radio frequency applicator

A substrate support assembly, comprising:

• a shaft assembly;
• a pedestal coupled to a portion of the shaft assembly;
• and
• a first rotary connector coupled to the shaft assembly, wherein the first rotary connector comprises:
• a rotatable coil member surrounding a rotatable dielectric shaft that is electromagnetically coupled to the shaft assembly during operation;
• a stationary coil member surrounding the rotatable coil member, wherein the rotatable coil member electromagnetically couples with the stationary coil member when the rotatable radio frequency applicator is energized and provides a radio frequency power to the pedestal through the shaft assembly;
• and
• a conductive housing disposed about the stationary coil member.

A substrate support assembly, comprising:

• a shaft assembly;
• a pedestal coupled to a portion of the shaft assembly;
• and
• a first rotary connector coupled to the shaft assembly, wherein the first rotary connector comprises a rotatable radio frequency applicator, the rotatable radio frequency applicator comprising:
• a rotating conductive member surrounding a rotatable shaft member that is electromagnetically coupled to the shaft assembly during operation;
• a stationary conductive member at least partially surrounding the rotating conductive member, wherein the rotating conductive member electromagnetically couples with the stationary conductive member when the rotatable radio frequency applicator is energized and provides a radio frequency power to the pedestal through the shaft assembly;
• and
• a conductive housing surrounding the rotatable radio frequency applicator.