Strain sensor, pressure sensor, microphone, blood pressure sensor, personal digital assistant, and hearing aid

A pressure sensor comprising a strain sensor,

• the strain sensor including:
• a base including a film body capable of being deformed by a pressure;
• a strain sensing element provided on the film body and including:
• a first magnetic layer having a first magnetization;
• a second magnetic layer having a second magnetization;
• and
• a first intermediate layer provided between the first magnetic layer and the second magnetic layer,
• in the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changing in accordance with a strain;
• a magnetic field sensing element provided on the base other than the film body and including:
• a third magnetic layer having a third magnetization;
• a fourth magnetic layer having a fourth magnetization;
• and
• a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer,
• in the magnetic field sensing element an angle between a direction of the third magnetization and a direction of the fourth magnetization changing in accordance with a magnetic field;
• and
• a processing unit configured to process an output signal of the strain sensing element and an output signal of the magnetic field sensing element.

A blood pressure sensor comprising a pressure sensor including a strain sensor,

• the strain sensor including:
• a base including a film body capable of being deformed by a pressure;
• a strain sensing element provided on the film body and including:
• a first magnetic layer having a first magnetization;
• a second magnetic layer having a second magnetization;
• and
• a first intermediate layer provided between the first magnetic layer and the second magnetic layer,
• in the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changing in accordance with a strain;
• a magnetic field sensing element provided on the base other than the film body and including:
• a third magnetic layer having a third magnetization;
• a fourth magnetic layer having a fourth magnetization;
• and
• a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer,
• in the magnetic field sensing element an angle between a direction of the third magnetization and a direction of the fourth magnetization changing in accordance with a magnetic field;
• and
• a processing unit configured to process an output signal of the strain sensing element and an output signal of the magnetic field sensing element.

A microphone comprising a pressure sensor including a strain sensor,

• the strain sensor including:
• a base including a film body capable of being deformed by a pressure;
• a strain sensing element provided on the film body and including:
• a first magnetic layer having a first magnetization;
• a second magnetic layer having a second magnetization;
• and
• a first intermediate layer provided between the first magnetic layer and the second magnetic layer,
• in the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changing in accordance with a strain;
• a magnetic field sensing element provided on the base other than the film body and including:
• a third magnetic layer having a third magnetization;
• a fourth magnetic layer having a fourth magnetization;
• and
• a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer,
• in the magnetic field sensing element an angle between a direction of the third magnetization and a direction of the fourth magnetization changing in accordance with a magnetic field;
• and
• a processing unit configured to process an output signal of the strain sensing element and an output signal of the magnetic field sensing element.

A personal digital assistant comprising a microphone including a pressure sensor,

• the pressure sensor including a strain sensor,
• the strain sensor including:
• a base including a film body capable of being deformed by a pressure;
• a strain sensing element provided on the film body and including:
• a first magnetic layer having a first magnetization;
• a second magnetic layer having a second magnetization;
• and
• a first intermediate layer provided between the first magnetic layer and the second magnetic layer,
• in the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changing in accordance with a strain;
• a magnetic field sensing element provided on the base other than the film body and including:
• a third magnetic layer having a third magnetization;
• a fourth magnetic layer having a fourth magnetization;
• and
• a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer,
• in the magnetic field sensing element an angle between a direction of the third magnetization and a direction of the fourth magnetization changing in accordance with a magnetic field;
• and
• a processing unit configured to process an output signal of the strain sensing element and an output signal of the magnetic field sensing element.

A hearing aid comprising a microphone including a pressure sensor,

• the pressure sensor including a strain sensor,
• the strain sensor including:
• a base including a film body capable of being deformed by a pressure;
• a strain sensing element provided on the film body and including:
• a first magnetic layer having a first magnetization;
• a second magnetic layer having a second magnetization;
• and
• a first intermediate layer provided between the first magnetic layer and the second magnetic layer,
• in the strain sensing element an angle between a direction of the first magnetization and a direction of the second magnetization changing in accordance with a strain;
• a magnetic field sensing element provided on the base other than the film body and including:
• a third magnetic layer having a third magnetization;
• a fourth magnetic layer having a fourth magnetization;
• and
• a second intermediate layer provided between the third magnetic layer and the fourth magnetic layer,
• in the magnetic field sensing element an angle between a direction of the third magnetization and a direction of the fourth magnetization changing in accordance with a magnetic field;
• and
• a processing unit configured to process an output signal of the strain sensing element and an output signal of the magnetic field sensing element.