Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel

A strain sensing element provided on a film unit configured to be deformed, the strain sensing element comprising:

• a functional layer including at least one element selected from the group consisting of magnesium, silicon, and aluminum;
• a first magnetic layer;
• a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film unit;
• and
• a spacer layer provided between the first magnetic layer and the second magnetic layer,
• at least a part of the second magnetic layer being amorphous and including boron.

A pressure sensor comprising:

• a strain sensing element provided on a film unit configured to being deformed, the strain sensing element including:
• a functional layer including at least one of an oxide and a nitride;
• a first magnetic layer;
• a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film unit;
• and
• a spacer layer provided between the first magnetic layer and the second magnetic layer,
• at least a part of the second magnetic layer being amorphous and including boron;
• and
• the film unit.

A microphone comprising a pressure sensor, the pressure sensor including:

• a strain sensing element provided on a film unit configured to be deformed, the strain sensing element including:
• a functional layer including at least one of an oxide and a nitride;
• a first magnetic layer;
• a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film unit;
• and
• a spacer layer provided between the first magnetic layer and the second magnetic layer,
• at least a part of the second magnetic layer being amorphous and including boron;
• and
• the film unit.

A blood pressure sensor comprising a pressure sensor, the pressure sensor including:

• a strain sensing element provided on a film unit configured to be deformed, the strain sensing element including:
• a functional layer including at least one of an oxide and a nitride;
• a first magnetic layer;
• a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film unit;
• and
• a spacer layer provided between the first magnetic layer and the second magnetic layer,
• at least a part of the second magnetic layer being amorphous and including boron;
• and
• the film unit.

A touch panel comprising a pressure sensor, the pressure sensor including:

• a strain sensing element provided on a film unit configured to be deformed, the strain sensing element including:
• a functional layer including at least one of an oxide and a nitride;
• a first magnetic layer;
• a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film unit;
• and
• a spacer layer provided between the first magnetic layer and the second magnetic layer,
• at least a part of the second magnetic layer being amorphous and including boron;
• and
• the film unit.