Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
AssigneeKabushiki Kaisha Toshiba
InventorsYoshihiko Fuji, Hideaki Fukuzawa, Shiori Kaji
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Abstract
According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.
Claims34
A strain sensing element provided on a deformable substrate, comprising:
- a first magnetic layer;
- a second magnetic layer in which magnetization changes according to deformation of the substrate;
- a spacer layer provided between the first magnetic layer and the second magnetic layer;
- and
- a bias layer configured to apply a bias to the second magnetic layer, the second magnetic layer being provided between the spacer layer and the bias layer.
A strain sensing element provided on a deformable substrate, comprising:
- a lower magnetic layer in which magnetization changes according to deformation of the substrate;
- an upper magnetic layer in which magnetization changes according to deformation of the substrate;
- a spacer layer provided between the lower magnetic layer and the upper magnetic layer;
- a lower bias layer configured to apply a bias to the lower magnetic layer, the lower magnetic layer being provided between the spacer layer and the lower bias layer;
- and
- an upper bias layer configured to apply a bias to the upper magnetic layer, the upper magnetic layer being provided between the spacer layer and the upper bias layer.
A pressure sensor comprising:
- a support unit;
- a substrate supported by the support unit, the substrate being deformable;
- and
- a strain sensing element provided on the substrate,
- the strain sensing element including
- a first magnetic layer,
- a second magnetic layer in which magnetization changes according to deformation of the substrate,
- a spacer layer provided between the first magnetic layer and the second magnetic layer, and
- a bias layer configured to apply a bias to the second magnetic layer, the second magnetic layer being provided between the spacer layer and the bias layer.
A pressure sensor comprising:
- a support unit;
- a substrate supported by the support unit, the substrate being deformable;
- and
- a strain sensing element provided on the substrate,
- the strain sensing element including
- a lower magnetic layer in which magnetization changes according to deformation of the substrate,
- an upper magnetic layer in which magnetization changes according to deformation of the substrate,
- a spacer layer provided between the lower magnetic layer and the upper magnetic layer,
- a lower bias layer configured to apply a bias to the lower magnetic layer, the lower magnetic layer being provided between the spacer layer and the lower bias layer, and
- an upper bias layer configured to apply a bias to the upper magnetic layer, the upper magnetic layer being provided between the spacer layer and the upper bias layer.
Dependencies are inferred from the claim text.