Inertial sensor
AssigneeKabushiki Kaisha Toshiba
InventorsHideaki FUKUZAWA, Michiko HARA, Yoshihiko FUJI, Yoshihiro HIGASHI, Shiori KAJI, Akio HORI, Tomohiko NAGATA, Akiko YUZAWA, Akira KIKITSU
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushiki Kaisha Toshiba
InventorsHideaki FUKUZAWA, Michiko HARA, Yoshihiko FUJI, Yoshihiro HIGASHI, Shiori KAJI, Akio HORI, Tomohiko NAGATA, Akiko YUZAWA, Akira KIKITSU
Estimating the term…
According to one embodiment, an inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.
An inertial sensor comprising:
Dependencies are inferred from the claim text.