Gyroscope structure and gyroscope with improved quadrature compensation
AssigneeMurata Manufacturing Co., Ltd.
InventorsMarcus RINKIÖ, Anssi BLOMQVIST, Jaakko RUOHIO
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AssigneeMurata Manufacturing Co., Ltd.
InventorsMarcus RINKIÖ, Anssi BLOMQVIST, Jaakko RUOHIO
Estimating the term…
A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.
A microelectromechanical gyroscope structure, comprising:
Dependencies are inferred from the claim text.