Piezoelectric actuator module, method of manufacturing the same, and mems sensor having the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsSeung Mo LIM, Yun Sung KANG, In Young KANG, Jeong Suong YANG, Hwa Sun LEE
Life of this patent
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Abstract
An actuator includes a multi-layer part having a multilayered piezoelectric part comprising a plurality of piezoelectric bodies and an electrode part connected to the multilayered piezoelectric part, and a support part displaceably supporting the multi-layer part. The multilayered piezoelectric part is polled in the same direction. One of the piezoelectric bodies expands or contracts in an opposite direction to another piezoelectric body.
Claims26
A piezoelectric actuator module, comprising:
- a multi-layer part including a multilayered piezoelectric part comprising a plurality of piezoelectric bodies and an electrode part connected to the multilayered piezoelectric part;
- and
- a support part displaceably supporting the multi-layer part,
- wherein the multilayered piezoelectric part is polled in the same direction, and one of the piezoelectric bodies expands or contracts in an opposite direction to another piezoelectric body.
A method of manufacturing a piezoelectric actuator module, comprising:
- forming a wafer to be formed as a support part for supporting multilayered piezoelectric bodies;
- depositing a lower electrode on one surface of the wafer;
- depositing a second piezoelectric body on one surface of the lower electrode;
- depositing an intermediate electrode on one surface of the second piezoelectric body;
- patterning the intermediate electrode to have a predetermined pattern;
- depositing a first piezoelectric body on one surface of the second piezoelectric body and the intermediate electrode;
- and
- depositing an upper electrode on one surface of the first piezoelectric body.
An angular velocity sensor, comprising:
- a flexible substrate including a vibration member and a sensing member;
- a mass body connected to the flexible substrate;
- and
- a post supporting the flexible substrate,
- wherein the vibration member includes a multi-layer part which includes a multilayered piezoelectric part comprising a plurality of piezoelectric bodies and an electrode part connected to the multilayered piezoelectric part, the multi-layer part is displaceably supported to the post, the multilayered piezoelectric part is polled in the same direction, and one of the piezoelectric bodies expands or contracts in an opposite direction to another piezoelectric body.
A piezoelectric actuator, comprising:
- multi-layer piezoelectric bodies, one of the multilayer piezoelectric bodies expanding or contracting in an opposite direction to another of the multilayer piezoelectric bodies;
- one or more electrode parts connected to the multilayer piezoelectric bodies;
- and
- a support part coupled to the multi-layer piezoelectric bodies.
Dependencies are inferred from the claim text.