Turbine powered cleaning apparatus
AssigneeWafertech, LLC
InventorGuy JACOBSON
Life of this patent
Estimating the term…
Abstract
A rotary turbine cleaning device for cleaning semiconductor fabrication equipment works in conjunction with a clean room vacuum or other vacuum or other air pump. The fluid flow created by the vacuum action causes the rotors of the turbine assembly to rotate, thereby rotating the cleaning head. Attached to the cleaning head are bristles or other cleaning media which may dislodge particles from surfaces. The dislodged particles are drawn into the tube through an opening at the end of the tube and the vacuum action. In some embodiments, a lumen delivers a cleaning fluid to the cleaning head.
Claims20
A cleaning apparatus comprising:
- a tube having a first end coupled to an air pump and a rotatable cleaning device disposed at a second end that includes an annular opening;
- wherein said rotatable cleaning device comprises:
- a turbine with an axial shaft;
- a rotatable head coupled to said shaft at said second end;
- and
- an annular filter disposed between said rotatable head and said turbine and extending at least partially laterally across said tube;
- and
- bristles extending from said rotatable head.
A vacuum powered brush comprising:
- a vacuum system;
- a vacuum hose having a first end coupled to said vacuum system;
- a rotatable brush disposed at a second end of said vacuum hose, said rotatable brush comprising:
- a turbine with an axial shaft and a plurality of rotor blades disposed within said vacuum hose;
- a rotatable brush head disposed at said second end and coupled to said axial shaft;
- and
- a lumen disposed within a wall of said vacuum hose and coupled to a fluid source, said lumen terminating at said second end and capable of dispensing a cleaning fluid at said second end.
A cleaning apparatus comprising:
- a tube having a first end coupled to an air pump and a rotatable cleaning device disposed at a second end that includes an annular opening,
- wherein said rotatable cleaning device comprises:
- a turbine with an axial shaft disposed within said tube;
- a rotatable head coupled to said shaft at said second end;
- a lumen disposed within a wall of said tube and coupled to a fluid source, said lumen terminating at said second end and dispensing a cleaning fluid at said second end;
- an annular filter disposed between said rotatable head and said turbine and extending at least partially laterally across said tube;
- and
- bristles extending from said rotatable head.
Dependencies are inferred from the claim text.