Piezoelectric actuator, fluid discharge head, and image forming device
AssigneeRicoh Company, Ltd.
InventorsMasahiro Ishimori, Manabu Nishimura, Masaru Shinkai, Keiji UEDA, Tsutoh Aoyama, Toshiaki Masuda
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Abstract
A piezoelectric actuator includes a vibrating plate, a lower electrode provided on the vibrating plate, including a platinum film and a titanium oxide film formed on the platinum film, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film, in which the titanium oxide film is provided between the platinum film and the piezoelectric thin film.
Claims10
A piezoelectric actuator comprising:
- a vibrating plate;
- a lower electrode provided on the vibrating plate, including a platinum film and a titanium oxide film formed on the platinum film;
- a piezoelectric thin film provided on the lower electrode;
- and
- an upper electrode provided on the piezoelectric thin film, wherein
- the titanium oxide film is provided between the platinum film and the piezoelectric thin film.
A manufacturing method of a piezoelectric actuator comprising a vibrating plate, a lower electrode provided on the vibrating plate, including a platinum film and a titanium oxide film formed on the platinum film, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film, the method comprising:
- forming a titanium film on the platinum film;
- and
- thermally oxidizing the titanium film by rapid thermal annealing to form the titanium oxide film.
Dependencies are inferred from the claim text.