Electron source and X-ray fluorescence analyser using an electron source
AssigneeFenno-Aurum Oy
InventorsHeikki Johannes Sipila, Evgeny FEDKOV, Aleksandr SEREBRIAKOV
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Abstract
An electron source of an X-ray fluorescence analyser includes a photon source (201) and a photoelectric converter (203, 204) for converting photons into electrons. An electron multiplier (203, 204) multiplies the electrons, and a focusing element (206, 207) focuses them to a beam. A gastight casing (209) encloses the photoelectric converter and the electron multiplier (203, 204). An electron-transparent membrane (213) covers a first opening in the casing at a location where the focused electron beam is directed out of the casing.
Claims19
An electron source for generating an incident electron beam for a measurement device, comprising:
- a photon source,
- a photoelectric converter configured to convert photons from said photon source into electrons,
- an electron multiplier configured to multiply electrons coming from said photoelectric converter,
- a focusing element configured to focus electrons coming from said electron multiplier,
- a gastight casing that encloses at least said photoelectric converter and said electron multiplier, and
- an electron-transparent membrane that covers a first opening in said casing at a location where focused electrons are directed out of said casing.
A method for performing X-ray fluorescence analysis, comprising:
- emitting photons towards a photoelectric converter,
- multiplying electrons emitted by said photoelectric converter,
- focusing the multiplied electrons into an electron beam,
- directing said electron beam to a sample, and
- detecting an energy spectrum of fluorescent X-rays emitted by said sample as a response to being hit by said electron beam.
Dependencies are inferred from the claim text.