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US 2015/0048735 A1Published application
Encapsulated magnetron
AssigneeApplied Materials, Inc.
InventorsBrian T. WEST, Roger M. JOHNSON, Michael S. COX
Life of this patent
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Abstract
Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.
Claims20
A magnetron, comprising:
- a plurality of magnets, wherein each of the plurality of magnets has a first end and a second end;
- a first magnetic pole piece, wherein the first magnetic pole piece is coupled to the first end of the magnets;
- a second magnetic pole piece, wherein the second magnetic pole piece is coupled to the second end of the magnets;
- and
- a first encapsulating material covering the plurality of magnets.
2 more elements
A magnetron, comprising:
- a plurality of magnets, wherein each of the plurality of magnets has a first end and a second end;
- a backing plate, wherein the backing plate is coupled to the first end of the magnets;
- a first magnetic pole piece, wherein the first magnetic pole piece is coupled to the second end of the magnets;
- and
- a first encapsulating material covering the plurality of magnets.
2 more elements
A magnetron, comprising:
- a backing plate;
- a first magnetic pole piece;
- a second magnetic pole piece;
- a plurality of magnets disposed between the backing plate and the first magnetic pole piece;
- and
- a first encapsulating material covering the plurality of magnets.
3 more elements
Dependencies are inferred from the claim text.