Process For Plasma Treatment Employing Ceramic-Filled Polymer Composite Parts
AssigneeQuadrant Epp AG
InventorsScott Howard Williams, Richard William Campbell, Stephan Glander
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Abstract
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide or polybenzimidazole. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.
Claims17
A plasma process wherein a plasma is generated within a reactor having a plurality of internal parts at sub-atmospheric pressure, characterized in that at least one of the internal parts is made of a plasma-useful polymer filled with a toleratable ceramic filler, said plasma-useful polymer being selected from the group consisting of polyimides, polyamideimides, polyetherketones, polysulfones, polybenzimidazole, perfluoroalkoxy polymer, and polyarylenesulfides.
A plasma treating apparatus having a vacuum chamber adapted to receive a substrate to be plasma treated, and at least one apparatus component which is exposed to plasma in an interior of the apparatus, wherein the apparatus component is constructed of a plasma-useful polymer filled with a toleratable ceramic, said plasma-useful polymer being selected from the group consisting of polyimides, polyamideimides, polyetherketones, polysulfones, polybenzimidazole, perfluoroalkoxy polymer, and polyarylenesulfides.
Dependencies are inferred from the claim text.