Back to results
US 2015/0031215 A1Published application
Apparatus, hybrid laminated body, method and materials for temporary substrate support
Assignee3M Innovative Properties Company
InventorsWayne S. Mahoney, Rajdeep S. Kalgutkar
Life of this patent
Estimating the term…
Abstract
A hybrid laminated body is provided that includes a light-transmitting support, a latent release layer disposed upon the light-transmitting support, a joining layer disposed upon the latent release layer, and a polyamide thermoplastic priming layer disposed upon the joining layer. The hybrid laminated body can further include a substrate to be processed such as, for example, a silicon wafer to be ground. Also provided is a method for manufacturing the provided laminated body.
Claims16
A laminated body comprising:
- a light-transmitting support;
- a latent release layer disposed upon the light-transmitting support;
- a joining layer disposed upon the latent release layer;
- and
- a polyamide thermoplastic priming layer disposed upon the joining layer.
2 more elements
Dependencies are inferred from the claim text.