Deposition apparatus and method of manufacturing organic light emitting display apparatus by using the same
AssigneeSamsung Display Co., Ltd.
InventorsChang-Woo Shim, Jae-Hyun Kim, Sung-Chul Kim
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Abstract
A deposition apparatus includes a stage and a deposition module. The stage holds a substrate. The deposition module faces the substrate. The stage relatively moves in a direction relative to the deposition module. The deposition module includes a first feeding unit and a first light exposure unit. The first feeding unit sprays a first raw material toward the substrate. The first light exposure unit is disposed on at least one side of the first feeding unit and provides light to the at least one raw material sprayed on the substrate.
Claims20
A deposition apparatus comprising:
- a stage configured to hold a substrate;
- and
- a deposition module configured to face the substrate,
- wherein the stage relatively moves in a direction relative to the deposition module, and the deposition module comprises:
- a first feeding unit configured to spray a first raw material toward the substrate, and
- a first light exposure unit disposed on at least one side of the first feeding unit and configured to provide light to the first raw material sprayed on the substrate,
A deposition apparatus comprising:
- a chamber;
- a stage positioned in the chamber and configured to hold a substrate;
- and
- a deposition module positioned in the chamber and configured to face the substrate,
- wherein the stage relatively moves in a direction relative to the deposition module, and
- the deposition module comprises:
- a plurality of feeding units, each feeding unit configured to spray a raw material toward the substrate;
- and
- a plurality of light exposure units, each light exposure unit configured to provide light to the raw material sprayed on the substrate,
- wherein each feeding unit and each light exposure unit are alternately arranged along the direction.
A method of manufacturing an organic light emitting display apparatus, the method comprising:
- loading a substrate on a stage;
- relatively moving the stage relative to a deposition module between time T1 and time T2, wherein the deposition module is configured to spray a first raw material and a second raw material to the substrate;
- controlling the deposition module to spray, at the time T1, the first raw material on a first part of the substrate;
- controlling the deposition module to spray, at the time T2, the second raw material on first material deposited on the first part of the substrate;
- controlling the deposition module to spray, at the time T2, the first raw material on a second part of the substrate;
- controlling the deposition module to provide, immediately after the time T1 and before the time T2, light to the first material deposited on the first part of the substrate, wherein the time Ti precedes the time T2.
Dependencies are inferred from the claim text.