Back to results
US 2015/0030982 A1Published application
Fluorinated photopolymer with fluorinated sensitizer
AssigneeOrthogonal, Inc.
InventorsDouglas Robert Robello, Charles Warren Wright
Life of this patent
Estimating the term…
Abstract
A photosensitive composition useful for fabricating organic electronic devices comprises a fluorinated solvent a fluorinated sensitizing dye and a copolymer. The copolymer comprises at least two distinct repeating units, including a first repeating unit having a fluorine-containing group and a second repeating unit having a solubility-altering reactive group. The presence of the fluorinated sensitizing dye improves photosensitivity.
Claims19
A photosensitive composition comprising:
- a fluorinated solvent;
- a fluorinated sensitizing dye;
- and
- a copolymer comprising at least two distinct repeating units, including a first repeating unit having a fluorine-containing group and a second repeating unit having a solubility-altering reactive group.
1 more element
A method of patterning a device, comprising:
- forming a photopolymer layer on a device substrate, the photopolymer layer including a fluorinated sensitizing dye and a copolymer, wherein the copolymer comprises at least two distinct repeating units, including a first repeating unit having a fluorine-containing group and a second repeating unit having a solubility-altering reactive group, wherein the total fluorine content of the copolymer is in a range of 15 to 60% by weight;
- exposing the photopolymer layer to patterned light in a wavelength range of 300 to 450 nm to form an exposed photopolymer layer;
- and
- contacting the exposed photopolymer layer with a developing agent to remove a portion of the exposed photopolymer layer in accordance with the patterned light, thereby forming a developed structure having a first pattern of photopolymer covering the substrate and a complementary second pattern of uncovered substrate corresponding to the removed portion of photopolymer, the developing agent comprising at least 50% by volume of a fluorinated solvent.
1 more element
Dependencies are inferred from the claim text.