Volatile dihydropyrazinly and dihydropyrazine metal complexes
AssigneeAir Products and Chemicals, Inc.
InventorsSergei Vladimirovich Ivanov, Xinjian Lei, John Anthony Thomas Norman
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Abstract
A composition comprising dihydropyrazinyl anions that can be coordinated as 6 electron ligands to a broad range of different metals to yield volatile metal complexes for ALD and CVD depositions are described herein. Also described herein are undeprotonated dihydropyrazines that can coordinate to metals as stabilizing neutral ligands. In one embodiment, the composition is used for the direct liquid injection delivery of the metal dihydropyrazinyl complex precursor to the chamber of an ALD or CVD chamber for the deposition of metal-containing thin films such as, for example, ruthenium or cobalt metal films.
Claims13
A composition comprising one or more compounds having the following formulae 3A, 3B, and 3C:
- wherein R1, R2, R3, R4 are each independently selected from a C1-C6 linear, branched or cyclic alkyl group;
- R5 is independently selected from a H atom and a C1-C6 linear, branched, or cyclic alkyl group;
- (L) is an anion selected from cyclopentadienyl, pentaalkylcyclopentadienyl, pentamethylpentadienyl, dimethylpentadienyl, trimethylpentadienyl, methylcyclopentadienlyl, ethylcyclopentdienyl, imidazolyl, trialkylimidazolyl, pyrrolyl, and alkyl pyrrolyl;
- M is a divalent metal;
- x=1 or 2;
- x+y=2;
- X is independently selected from a H atom, a C1-C6 linear, branched, or cyclic alkyl group, and SiR6 and where R6 is independently selected from a C1-C3 linear or branched alkyl group.
A composition comprising a compound having Formula 3D comprising:
- where R1, R2, R3, R4 are each independently selected from a C1-C6 linear, branched, or cyclic alkyl group;
- R5 is independently selected from a H atom and a C1-C6 linear, branched, or cyclic alkyl group;
- (L) is an anion selected from cyclopentadienyl, pentaalkylcyclopentadienyl, pentamethylpentadienyl, dimethylpentadienyl, trimethylpentadienyl, methylcyclopentadienyl, ethylcyclopentdienyl, imidazolyl, trialkylimidazolyl, pyrrolyl, and alkyl pyrrolyl;
- M is a monovalent metal;
- x=1;
- y=1 or 2;
- and Z is independently selected from a H atom;
- a C1-C6 linear, branched, or cyclic alkyl group, and SiR6 where R6 is independently selected from a C1-C6 linear or branched C1-C3 alkyl group.
A composition comprising a compound having the following Formula 3E comprising:
- wherein R1, R2, R3, R4 are each independently selected from a C1-C6 linear, branched, or cyclic alkyl group;
- R5 is selected from a H atom and a C1-C6 linear, branched, or cyclic alkyl group;
- (Q) is selected from benzene and an alkylated benzene;
- M is a metal;
- x is 1 or 2;
- y=1;
- and Z is independently selected from a H atom and a C1-C6 linear, branched, or cyclic C1-C6 group, and SiR6 where R6 is a C1-C3 linear or branched, alkyl group.
A method for forming a metal oxide film on a substrate wherein the film comprises a thickness, the method comprising:
- a. introducing a metal dihydopyrazinyl complex comprising at least one selected from a Formula 3A, 3B, 3C, 3D, 3E, 3F, 3G, 3H compound or combinations thereof;
- b. chemisorbing the metal dihydopyrazinyl complex onto the substrate;
- c. purging away the a metal dihydopyrazinyl complex using a purge gas;
- d. providing an oxygen source to the metal dihydopyrazinyl complex onto the heated substrate to react with the sorbed metal dihydopyrazinyl complex containing composition;
- and
- e. optionally purging away any unreacted oxygen source.
A method for forming a metal film on a substrate wherein the film comprises a thickness, the method comprising:
- a. introducing a metal dihydopyrazinyl complex comprising at least one selected from a Formula 3A, 3B, 3C, 3D, 3E, 3F, 3G, 3H compound or combinations thereof;
- b. chemisorbing the metal dihydopyrazinyl complex onto the substrate;
- c. purging away the a metal dihydopyrazinyl complex using a purge gas;
- d. providing a reducing agent to the metal dihydopyrazinyl complex onto the heated substrate to react with the sorbed metal dihydopyrazinyl complex;
- and
- e. optionally purging away any unreacted reducing agent.
A composition comprising one or more compounds having the following formulae 3F, 3G, and 3H:
- wherein R1, R2, R3, R4 are each independently selected from a C1-C6 linear, branched or cyclic alkyl group;
- R5 is independently selected from a H atom and a C1-C6 linear, branched, or cyclic alkyl group;
- (Q) is a neutral ligand;
- M is a monovalent metal;
- y=1;
- X is independently selected from a H atom, a C1-C6 linear, branched, or cyclic alkyl group, and SiR6 and where R6 is independently selected from a C1-C3 linear or branched alkyl group.
Dependencies are inferred from the claim text.