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US 2015/0030781 A1Published application
Multi-tip spark discharge generator and method for producing nanoparticle structure using same
AssigneesBlobal Frontier Center for Multiscale Energy Systems, Snu R&Db Foundation
InventorsMan Soo Choi, Kyungyeon Ha, Hoseop Choi, Kyuhee Han, Kinam Jung, Dongjoon Lee, Sukbyung Chae
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Abstract
The present invention relates to a spark discharge generator. The spark discharge system of the present invention includes a plurality of columnar electrodes and a ground plate having a plurality of outlet holes at positions corresponding to the columnar electrodes. The use of the spark discharge generator enables the production of a three-dimensionally shaped nanostructure array on a large area in a uniform and rapid manner.
Claims12
A spark discharge generator comprising
- a discharge chamber having gas inlets and outlets,
- a plurality of columnar electrodes located in the discharge chamber,
- a ground plate located in the discharge chamber and having a plurality of outlet holes at positions corresponding to the columnar electrodes, and
- a substrate support located opposite the columnar electrodes and the ground plate.
1 more element
Dependencies are inferred from the claim text.