Particulate film laminating system and particulate film laminating method using same
AssigneeKabushiki Kaisha Atsumitec
InventorsNaoki Uchiyama, Tomomi Kanai
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AssigneeKabushiki Kaisha Atsumitec
InventorsNaoki Uchiyama, Tomomi Kanai
Estimating the term…
A particulate film laminating system includes: a nanoparticle generating chamber in which nanoparticles of a metal material are generated; a nanofiber generating chamber in which nanofibers of a resin material are generated; a laminating chamber in which the nanoparticles and the nanofibers are film-formed and laminated on a substrate; a nanoparticle film-forming region configured such that the nanoparticles are film-formed in the laminating chamber; a nanofiber film-forming region configured such that the nanofibers are film-formed in the laminating chamber; a moving unit which moves the substrate between the nanoparticle film-forming region and the nanofiber film-forming region; an exhaust unit which exhausts the laminating chamber; and a coolant-gas introduction unit which introduces coolant gas into each of the nanoparticle generating chamber and the nanofiber generating chamber.
A particulate film laminating system comprising:
Dependencies are inferred from the claim text.