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US 2015/0030759 A1Published application
Multi-plume pulsed laser deposition system for high-throughput fabrication of diverse materials
OwnerXiaojun Zhanginventor
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Abstract
A multi-plume pulsed laser deposition (MPPLD) system has been provided for fabrication of an array of diverse materials in predefined regions on a substrate. In one embodiment, the method comprises splitting a high power laser beam into multiple laser beams, split laser beams being focused onto target materials, multiple plumes being generated on the surfaces of target materials, deposition of ablated target materials non-uniformly on a substrate covered with a mask, and heating the substrate during deposition.
Claims13
A method of making an array of diverse materials, comprising:
- splitting said high power laser beam into said multiple laser beams;
- said split laser beams being focused by said spherical lenses onto said target materials in said vacuum chamber;
- said multiple plumes being generated on the surfaces of said target materials;
- deposition of ablated said target materials non-uniformly on said substrate covered with said mask;
- and
- said heater heating said substrate during said deposition.
3 more elements
Dependencies are inferred from the claim text.