Vacuum pump
AssigneePfeiffer Vacuum GmbH
InventorsMirko Mekota, Jan Hofmann, Uwe Leib, Michael Schill, Bernhard Koch
Life of this patent
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Abstract
A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.
Claims20
A vacuum pump having a pump inlet (10), a pump outlet (12), a rotor (16) rotatable about an axis of rotation (14), at least one process gas pump stage for conveying a process gas present at the pump inlet (10) from the pump inlet (10) to the pump outlet (12), a motor space (18) and a drive motor (20) which is arranged in the motor space (18), which is configured for the rotating driving of the rotor (16) and which comprises a motor stator (22), wherein at least one gas path for the process gas is provided from the pump inlet (10) to the pump outlet (12) which leads through the motor space (18) and leads at least sectionally along the motor stator (22) or through the motor stator (22).
Dependencies are inferred from the claim text.