Substrate inspection method, substrate manufacturing method and substrate inspection device

A substrate manufacturing method,

• comprising:
• a substrate formation step of constituting a substrate having a plurality of holes formed on a plate-shaped material so as to extend over front rear surfaces of the plate-shaped material;
• an image acquisition step of obtaining a hole image of each hole by imaging the plurality of holes formed on the substrate from one surface side of the substrate constituted in the substrate formation step;
• a reference specification step of specifying a reference hole image of the plurality of holes from an imaging result obtained by the image acquisition step;
• a quantification step of obtaining and quantifying a similarity between each hole image and the reference hole image, each hole image being the imaging result obtained by the image acquisition step by pattern matching processing using a specific correlative function;
• and
• a formation inspection step of judging proper/improper hole shape of each of the plurality of holes using a quantification result of each hole image obtained by the quantification step as an index.

A substrate inspection device for inspecting a substrate having a plurality of holes formed on a plate-shaped material so as to extend over front and rear surfaces of the plate-shaped material, the device comprising:

• an image acquisition unit configured to obtain a hole image of each hole by imaging the plurality of holes formed on the substrate from one surface side of the substrate;
• a reference specification unit configured to specify a reference hole image of the plurality of holes from an imaging result obtained by the image acquisition unit;
• a quantification unit configured to obtain and quantify a similarity between each hole image and the reference hole image by pattern matching processing using a specific correlative function, each hole image being the imaging result obtained by the image acquisition unit;
• and
• a shape inspection unit configured to judge proper/improper hole shape of each of the plurality of holes using a quantification result of each hole image obtained by the quantification unit as an index.