Micro-electromechanical system (mems) carrier

A micro-electromechanical system (MEMS) carrier, including:

• a first frame;
• a second frame, formed within the first frame and movable in a Y axis direction;
• a first conductive coil, formed on the second frame;
• two first return springs, formed between the first frame and the second frame thereby connecting the second frame to the first frame and providing a return force to the second frame in the Y axis direction;
• a movable carrier element, formed inside the second frame and movable in an X axis direction;
• a second conductive coil, formed on the movable carrier element;
• two second return springs, formed between the first frame and the second frame thereby connecting the second frame to the first frame and providing a return force to the second frame in the X axis direction;
• and
• two pair of permanent magnets, formed two magnetic field in opposite direction for co-acting with the first conductive coil and the second conductive coil respectively for generating an electromagnetic Lorenz force to drive the second frame to move in the Y axis direction against the return force of the two first return springs, and generating another electromagnetic Lorenz force to drive the movable carrier element to move in the X axis direction against the return force of the two second return springs.